حرارتی مطالعه گذرا از سیلیکا ایروژل عایق میکرو حتبلتس
Abstract: We studied the temperature transient behavior of an airpit-insulated micro hotplate (μHP) and aerogel-insulated μHP with different airpit heights and aerogel thicknesses. The μHP insulated by 1.3μm-thick aerogel consumes 26.7mW of power at 82°C with a time constant of 114.5 μsec, while the μHP insulated by 4?μm-thick aerogel consumes 35.6mW of power to provide 220°C with a time constant of 211.6 μsec. At the same time, a 100 μm-deep airpit-insulated ?HP consumes 18mW of power to reach approximately 400°C. The time constant of aerogel does not depend just on material properties but also on the structural design of the micro-heater. The temperature transient response time of μHPs is continued to improve from using air-pited, recessed silica aerogel, to thick-film silica aerogel.